ED500 High Vacuum Triple-Target Magnetron Sputtering Coating System
Year of Purchase: 2016
Manufacturer: Aimingke Technology Co., Ltd. (China)
Technical Specifications:
Ultimate Vacuum of Sputtering Chamber: 7 × 10⁻⁵ Pa
Substrate Size: Diameter ≤ 2 inches
Functions:
Deposition of functional thin films.
Location: Gaojingjian Building, B1 Floor
Contact Person: Huang Haili
Telephone: 64441471
Email: hlhuang@mail.buct.edu.cn