ED500 High Vacuum Triple-Target Magnetron Sputtering Coating System

Year of Purchase: 2016

Manufacturer: Aimingke Technology Co., Ltd. (China)

Technical Specifications:

Ultimate Vacuum of Sputtering Chamber: 7 × 10⁻⁵ Pa

Substrate Size: Diameter ≤ 2 inches

Functions:

Deposition of functional thin films.

Location: Gaojingjian Building, B1 Floor

Contact Person: Huang Haili

Telephone: 64441471

Email: hlhuang@mail.buct.edu.cn